Products
Our software solutions for semiconductor manufacturing are built for demanding production environments and can be tailored to your process requirements. Each configuration is set up for your production line, tool landscape, and engineering workflow.
You select the modules that fit your requirements; we handle the integration details. In addition to software setup, we provide regular updates, user training, and 24/7 support.
During development, we focus on usability, clarity, and a clean technical design. Each module provides a focused interface for its specific workflow.
The solution is built on a consistent platform architecture. This makes it straightforward to integrate new modules. These can include APC modules as well as adjacent functionality. Users access all integrated modules through one coherent interface.
lithoAPC is a detailed data management of exposures and Overlay/Critical Dimension analysis data. It delivers full traceability for events and process data. Its robust merge approach handles incoming production data across lithography use cases.
lithoAPC includes the following modules:
The CMP extension integrates with the BlueLine APC server and desktop environment. It is delivered as dedicated plug-ins. For CMP-only deployments, we provide a streamlined installation containing only the components required for CMP workflows.
cmpAPC includes the following modules:
Selected views from lithoAPC and cmpAPC
